Engineering / Microstructure / Electron Microscopy / Nanoparticles / Transmission Electron Microscopy / Electron Diffraction / Plasma Processing / Thin Film / Physical sciences / Radio Frequency / Titanium nitride / Chemical Properties / Nanocrystal / Electron Diffraction / Plasma Processing / Thin Film / Physical sciences / Radio Frequency / Titanium nitride / Chemical Properties / Nanocrystal