MEMS

In-plane spectroscopy of microfluidic systems made in photosensitive glass

MEMS / Microfluidics / Nanotechnology / Optofluidics / Photosensitive Glass

A New Diaphragm Material for Optical Fibre Fabry-Perot Pressure Sensor

MEMS / Resolution / Optical Fibre / Polydimethylsiloxane / Pressure Sensor / Fabry Perot / Pressure Sensors / Measurement System / Fabry Perot / Pressure Sensors / Measurement System

In-plane spectroscopy of microfluidic systems made in photosensitive glass

MEMS / Microfluidics / Nanotechnology / Optofluidics / Photosensitive Glass

Silicon Carbide in Microsystem Technology — Thin Film Versus Bulk Material

MEMS / Thin Films / Silicon Carbide / Bulk materials

Carbeto de Silício como Material Base para Sensores MEMS de Uso Aeroespacial: Uma Visão Geral Silicon Carbide as Base Material for MEMS Sensors of Aerospace Use: An Overview

MEMS / Silicon Carbide

In-plane spectroscopy of microfluidic systems made in photosensitive glass

MEMS / Microfluidics / Nanotechnology / Optofluidics / Photosensitive Glass

A fast-response microfluidic gas concentrating device for environmental sensing

Materials Engineering / Mechanical Engineering / Computational Fluid Dynamics / MEMS / Numerical Simulation / Real Time / Reactive ion etching / Molecular weight / Electrical And Electronic Engineering / Real Time / Reactive ion etching / Molecular weight / Electrical And Electronic Engineering

Application of Micro-Electro-Mechanical Sensors Contactless NDT of Concrete Structures

Analytical Chemistry / MEMS / Ultrasound / Sensors / Electrical And Electronic Engineering

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