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A six-wafer combustion system for a silicon micro gas turbine engine

Packaging / Combustion / Microelectromechanical systems / Air flow / Fuel / Compressor / Systems / Package / Aerofoil Design / Experimental Tests / Reactive ion etching / Electric Power / Fuel Injector / Fluidics / Combustion Chamber / Elevated Temperature / Mass Flow Rate / Electrical And Electronic Engineering / Wafer / Compressor / Systems / Package / Aerofoil Design / Experimental Tests / Reactive ion etching / Electric Power / Fuel Injector / Fluidics / Combustion Chamber / Elevated Temperature / Mass Flow Rate / Electrical And Electronic Engineering / Wafer

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Novel potentiometric silicon sensor for medical devices

Materials Engineering / Analytical Chemistry / Biomedical Engineering / Manufacturing / Instrumentation / Quantitative analysis / Micromachining / Thin Film / Fabrication / Medical Device / In Vivo / Chip / Quantitative Analysis / Potentiometric Sensor / Electrolyte / Wafer / Quantitative analysis / Micromachining / Thin Film / Fabrication / Medical Device / In Vivo / Chip / Quantitative Analysis / Potentiometric Sensor / Electrolyte / Wafer

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