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25 nm CMOS Omega FETs

Nanoelectronics / VLSI / Leakage Current / Low Power Electronics / Iedm / Low voltage / Hot Carriers / Low voltage / Hot Carriers

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A 45 nm CMOS node Cu/Low-k/ Ultra Low-k PECVD SiCOH (k=2.4) BEOL Technology

High performance / Fundamental Solution / Iedm / System performance / Aspect Ratio

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